OpenAlex is a bibliographic catalogue of scientific papers, authors and institutions accessible in open access mode, named after the Library of Alexandria. It's citation coverage is excellent and I hope you will find utility in this listing of citing articles!
If you click the article title, you'll navigate to the article, as listed in CrossRef. If you click the Open Access links, you'll navigate to the "best Open Access location". Clicking the citation count will open this listing for that article. Lastly at the bottom of the page, you'll find basic pagination options.
Requested Article:
Breakthrough curvilinear ILT enabled by multi-beam mask writing
Linyong Pang, E. Vidal Russell, Bill Baggenstoss, et al.
Journal of Micro/Nanopatterning Materials and Metrology (2021) Vol. 20, Iss. 04
Open Access | Times Cited: 3
Linyong Pang, E. Vidal Russell, Bill Baggenstoss, et al.
Journal of Micro/Nanopatterning Materials and Metrology (2021) Vol. 20, Iss. 04
Open Access | Times Cited: 3
Showing 3 citing articles:
Fast and high-fidelity EUV curvilinear mask optimization by distance-versus-angle signature
Weichen Huang, Yanqiu Li, Yang He, et al.
Optics Express (2024) Vol. 32, Iss. 15, pp. 26292-26292
Open Access | Times Cited: 1
Weichen Huang, Yanqiu Li, Yang He, et al.
Optics Express (2024) Vol. 32, Iss. 15, pp. 26292-26292
Open Access | Times Cited: 1
Assessing need and methodology for mask constraints in ILT applications
Mohamed Ramadan, Christopher J. Progler, Henry Kamberian, et al.
(2024), pp. 117-117
Closed Access
Mohamed Ramadan, Christopher J. Progler, Henry Kamberian, et al.
(2024), pp. 117-117
Closed Access
Curvilinear EUV mask: development of innovative mask metrology
Maxence Delorme, Werner Gillijns, Christoph Hennerkes, et al.
(2022), pp. 37-37
Closed Access | Times Cited: 1
Maxence Delorme, Werner Gillijns, Christoph Hennerkes, et al.
(2022), pp. 37-37
Closed Access | Times Cited: 1
