OpenAlex is a bibliographic catalogue of scientific papers, authors and institutions accessible in open access mode, named after the Library of Alexandria. It's citation coverage is excellent and I hope you will find utility in this listing of citing articles!
If you click the article title, you'll navigate to the article, as listed in CrossRef. If you click the Open Access links, you'll navigate to the "best Open Access location". Clicking the citation count will open this listing for that article. Lastly at the bottom of the page, you'll find basic pagination options.
Requested Article:
Electron-enhanced atomic layer deposition of Ru thin films using Ru(DMBD)(CO)3 and effect of forming gas anneal
Michael A. Collings, Marcel Junige, Andrew S. Cavanagh, et al.
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (2023) Vol. 41, Iss. 6
Closed Access | Times Cited: 1
Michael A. Collings, Marcel Junige, Andrew S. Cavanagh, et al.
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (2023) Vol. 41, Iss. 6
Closed Access | Times Cited: 1
Showing 1 citing articles:
Selectivity between SiO2 and SiNx during Thermal Atomic Layer Etching Using Al(CH3)3/HF and Spontaneous Etching Using HF and Effect of HF + NH3 Codosing
Marcel Junige, Steven M. George
Chemistry of Materials (2024) Vol. 36, Iss. 14, pp. 6950-6960
Closed Access | Times Cited: 2
Marcel Junige, Steven M. George
Chemistry of Materials (2024) Vol. 36, Iss. 14, pp. 6950-6960
Closed Access | Times Cited: 2
