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OpenAlex Citation Counts

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OpenAlex is a bibliographic catalogue of scientific papers, authors and institutions accessible in open access mode, named after the Library of Alexandria. It's citation coverage is excellent and I hope you will find utility in this listing of citing articles!

If you click the article title, you'll navigate to the article, as listed in CrossRef. If you click the Open Access links, you'll navigate to the "best Open Access location". Clicking the citation count will open this listing for that article. Lastly at the bottom of the page, you'll find basic pagination options.

Requested Article:

Multitask learning for virtual metrology in semiconductor manufacturing systems
Chan Hee Park, Young-Hoon Kim, Young-Joon Park, et al.
Computers & Industrial Engineering (2018) Vol. 123, pp. 209-219
Closed Access | Times Cited: 31

Showing 1-25 of 31 citing articles:

Virtual metrology as an approach for product quality estimation in Industry 4.0: a systematic review and integrative conceptual framework
Paul-Arthur Dreyfus, Foivos Psarommatis, Gökan May, et al.
International Journal of Production Research (2021) Vol. 60, Iss. 2, pp. 742-765
Open Access | Times Cited: 76
A Review of Data Mining Applications in Semiconductor Manufacturing
Pedro Espadinha-Cruz, Radu Godina, Eduardo M. G. Rodrigues
Processes (2021) Vol. 9, Iss. 2, pp. 305-305
Open Access | Times Cited: 57
Decision-based virtual metrology for advanced process control to empower smart production and an empirical study for semiconductor manufacturing
Chen‐Fu Chien, Wei-Tse Hung, Chin-Wei Pan, et al.
Computers & Industrial Engineering (2022) Vol. 169, pp. 108245-108245
Closed Access | Times Cited: 28
Joint modeling of classification and regression for improving faulty wafer detection in semiconductor manufacturing
Seokho Kang
Journal of Intelligent Manufacturing (2018) Vol. 31, Iss. 2, pp. 319-326
Closed Access | Times Cited: 29
Quality prediction for multi-grade batch process using sparse flexible clustered multi-task learning
Takafumi Yamaguchi, Yoshiyuki Yamashita
Computers & Chemical Engineering (2021) Vol. 150, pp. 107320-107320
Closed Access | Times Cited: 18
A Realizable Overlay Virtual Metrology System in Semiconductor Manufacturing: Proposal, Challenges and Future Perspective
Tze Chiang Tin, Shing Chiang Tan, Hing Yong, et al.
IEEE Access (2021) Vol. 9, pp. 65418-65439
Open Access | Times Cited: 16
Adaptive fault detection framework for recipe transition in semiconductor manufacturing
Jaewoong Shim, Sungzoon Cho, Euiseok Kum, et al.
Computers & Industrial Engineering (2021) Vol. 161, pp. 107632-107632
Closed Access | Times Cited: 14
Clustered Multi-Task Sequence-to-Sequence Learning for Autonomous Vehicle Repositioning
Sangmin Lee, Dae-Eun Lim, Younkook Kang, et al.
IEEE Access (2021) Vol. 9, pp. 14504-14515
Open Access | Times Cited: 13
Semiconductor Manufacturing Process Improvement Using Data-Driven Methodologies
Hribhu Chowdhury
(2023)
Open Access | Times Cited: 5
Virtual metrology of material removal rate using a one-dimensional convolutional neural network-based bidirectional long short-term memory network with attention
Chia-Yu Hsu, Yiwei Lu
Computers & Industrial Engineering (2023) Vol. 186, pp. 109701-109701
Closed Access | Times Cited: 4
True sparse PCA for reducing the number of essential sensors in virtual metrology
Yifan Xie, Tianhui Wang, Young‐Seon Jeong, et al.
International Journal of Production Research (2023) Vol. 62, Iss. 6, pp. 2142-2157
Closed Access | Times Cited: 3
Virtual metrology in long batch processes using machine learning
Ritam Guha, Anirudh Suresh, Jared DeFrain, et al.
Materials and Manufacturing Processes (2023) Vol. 38, Iss. 15, pp. 1997-2008
Closed Access | Times Cited: 3
Semiconductor Manufacturing Process Improvement Using Data-Driven Methodologies
Hribhu Chowdhury
(2023)
Open Access | Times Cited: 3
Volumetric nondestructive metrology for 3D semiconductor packaging: A review
Yutai Su, Jing Shi, Yuan-Ming Hsu, et al.
Measurement (2023) Vol. 225, pp. 114065-114065
Closed Access | Times Cited: 3
Mapping Oxidation and Wafer Cleaning to Device Characteristics Using Physics-Assisted Machine Learning
Sparsh Pratik, Po-Ning Liu, Jun Ota, et al.
ACS Omega (2022) Vol. 7, Iss. 1, pp. 933-946
Open Access | Times Cited: 5
Improvement of Virtual Diagnostics Performance for Plasma Density in Semiconductor Etch Equipment Using Variational Auto-Encoder
Ohyung Kwon, Nayeon Lee, Kangil Kim
IEEE Transactions on Semiconductor Manufacturing (2022) Vol. 35, Iss. 2, pp. 256-265
Closed Access | Times Cited: 5
An improved virtual metrology method in chemical vapor deposition systems via multitask gaussian processes and adaptive active learning
Shanling Ji, Min Dai, Haiying Wen, et al.
The International Journal of Advanced Manufacturing Technology (2022) Vol. 122, Iss. 7-8, pp. 3149-3159
Closed Access | Times Cited: 5
Predicting the Wafer Material Removal Rate for Semiconductor Chemical Mechanical Polishing Using a Fusion Network
Chien‐Liang Liu, Chun-Jan Tseng, Wen-Hoar Hsaio, et al.
Applied Sciences (2022) Vol. 12, Iss. 22, pp. 11478-11478
Open Access | Times Cited: 5
Machine learning applied to the prediction of root architecture of soybean cultivars under two water availability conditions
Anunciene Barbosa Duarte, Dalton de Oliveira Ferreira, Lucas Borges Ferreria, et al.
Semina Ciências Agrárias (2022) Vol. 43, Iss. 3, pp. 1017-1036
Open Access | Times Cited: 4
Multi-target regression via target combinations using principal component analysis
Takafumi Yamaguchi, Yoshiyuki Yamashita
Computers & Chemical Engineering (2023) Vol. 181, pp. 108510-108510
Closed Access | Times Cited: 2
Reference-based Virtual Metrology method with uncertainty evaluation for Material Removal Rate prediction based on Gaussian Process Regression
Haoshu Cai, Jianshe Feng, Qibo Yang, et al.
The International Journal of Advanced Manufacturing Technology (2021) Vol. 116, Iss. 3-4, pp. 1199-1211
Closed Access | Times Cited: 5
What are the Most Informative Data for Virtual Metrology? A use case on Multi-Stage Processes Fault Prediction
Marco Maggipinto, Gian Antonio Susto, Federico Zocco, et al.
2022 IEEE 18th International Conference on Automation Science and Engineering (CASE) (2019) Vol. 1, pp. 1796-1801
Closed Access | Times Cited: 4
Multi-source AdaBoost with cross-weight method for virtual metrology in semiconductor manufacturing
Tianhui Wang, Jae-Seung Baek, Myong K. Jeong, et al.
International Journal of Production Research (2024) Vol. 62, Iss. 19, pp. 7114-7129
Closed Access
The use of multi-task learning in cybersecurity applications: a systematic literature review
Shimaa Ibrahim, Cagatay Catal, Thabet Kacem
Neural Computing and Applications (2024)
Open Access
Restricted Relevance Vector Machine for Missing Data and Application to Virtual Metrology
Jeongsub Choi, Youngdoo Son, Myong K. Jeong
IEEE Transactions on Automation Science and Engineering (2021) Vol. 19, Iss. 4, pp. 3172-3183
Closed Access | Times Cited: 4
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